A platform for research: civil engineering, architecture and urbanism
Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target
Process for preparing a ceramic from an inorganic base material that is in the form of a powder having a high melting point, comprising a step of mixing the powder of the inorganic base material with a second inorganic component also in powder form and which acts as a dopant for the inorganic base material. The dopant is constituted by a single inorganic material or by a mixture of at least two inorganic materials having a dopant effect on the inorganic base material. The process comprises a sintering step carried out at a high temperature. The ceramics obtained, because of their high density, are advantageously used as a target element. Films and electrodes obtained from these ceramics exhibit particularly advantageous properties.
Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target
Process for preparing a ceramic from an inorganic base material that is in the form of a powder having a high melting point, comprising a step of mixing the powder of the inorganic base material with a second inorganic component also in powder form and which acts as a dopant for the inorganic base material. The dopant is constituted by a single inorganic material or by a mixture of at least two inorganic materials having a dopant effect on the inorganic base material. The process comprises a sintering step carried out at a high temperature. The ceramics obtained, because of their high density, are advantageously used as a target element. Films and electrodes obtained from these ceramics exhibit particularly advantageous properties.
Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target
CAMPET GUY (author) / SAADEDDIN IYAD (author) / ZAGHIB KARIM (author)
2015-09-01
Patent
Electronic Resource
English
European Patent Office | 2018
|European Patent Office | 2015
|European Patent Office | 2016
|POLYCRYSTALLINE CERAMICS, PRODUCTION THEREOF, AND USES THEREOF
European Patent Office | 2015
|POLYCRYSTALLINE CERAMICS PRODUCTION THEREOF AND USES THEREOF
European Patent Office | 2017