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Oriented piezoelectric film, method for producing the oriented piezoelectric film, and liquid dispensing head
An oriented piezoelectric film, wherein a crystal forming the oriented piezoelectric film, is a perovskite type crystal of the general formula of Ba1-xCaxTi1-yZryO3 (0≤x≤0.2, and 0≤y≤0.2), and the oriented piezoelectric film has (111) orientation according to a pseudocubic crystal notation.
Oriented piezoelectric film, method for producing the oriented piezoelectric film, and liquid dispensing head
An oriented piezoelectric film, wherein a crystal forming the oriented piezoelectric film, is a perovskite type crystal of the general formula of Ba1-xCaxTi1-yZryO3 (0≤x≤0.2, and 0≤y≤0.2), and the oriented piezoelectric film has (111) orientation according to a pseudocubic crystal notation.
Oriented piezoelectric film, method for producing the oriented piezoelectric film, and liquid dispensing head
OHASHI YOSHIHIRO (author) / KOTANI YOSHINORI (author) / KOBAYASHI MOTOKAZU (author)
2020-09-08
Patent
Electronic Resource
English
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