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A platform for research: civil engineering, architecture and urbanism
DOOR FOR CLOSING A CHAMBER OPENING IN A CHAMBER WALL OF A VACUUM CHAMBER
A door for closing a chamber opening (4) in a chamber wall of a vacuum chamber (3) in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged in a surrounding space, a closing member (5) arranged in the surrounding space, and a rod (10), to which the closing member (5) is connected, wherein a first movement of the rod (10), through which the closing member (5) is displaced from an open position into an intermediate position, occurring in the form of a displacement of the rod (10) in the direction of the longitudinal axis thereof, wherein a second movement of the rod (10) subsequent thereto occurs in the form of a displacement of the rod (10) in a direction at an angle to the longitudinal axis thereof and/or in the form of a pivoting of the rod (10) about a pivot axis which is perpendicular to the longitudinal axis thereof, wherein the closing member is displaced from the intermediate position into a closed position via said second movement of the rod. The rod (10) is mounted in a moveable manner via the bearing elements, via the first movement thereof and via the second movement thereof in relation to the door housing, wherein the bearing elements are arranged in an inner space (30) of the door housing, which inner space is sealed with respect to the surrounding space or is connected to the surrounding space via a passage (41) extending through a housing wall (40) of the door housing, in which passage a particle filter is arranged. The rod (10) is guided out of the inner space (30) of the door housing into the surrounding space in a sealed manner.
DOOR FOR CLOSING A CHAMBER OPENING IN A CHAMBER WALL OF A VACUUM CHAMBER
A door for closing a chamber opening (4) in a chamber wall of a vacuum chamber (3) in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged in a surrounding space, a closing member (5) arranged in the surrounding space, and a rod (10), to which the closing member (5) is connected, wherein a first movement of the rod (10), through which the closing member (5) is displaced from an open position into an intermediate position, occurring in the form of a displacement of the rod (10) in the direction of the longitudinal axis thereof, wherein a second movement of the rod (10) subsequent thereto occurs in the form of a displacement of the rod (10) in a direction at an angle to the longitudinal axis thereof and/or in the form of a pivoting of the rod (10) about a pivot axis which is perpendicular to the longitudinal axis thereof, wherein the closing member is displaced from the intermediate position into a closed position via said second movement of the rod. The rod (10) is mounted in a moveable manner via the bearing elements, via the first movement thereof and via the second movement thereof in relation to the door housing, wherein the bearing elements are arranged in an inner space (30) of the door housing, which inner space is sealed with respect to the surrounding space or is connected to the surrounding space via a passage (41) extending through a housing wall (40) of the door housing, in which passage a particle filter is arranged. The rod (10) is guided out of the inner space (30) of the door housing into the surrounding space in a sealed manner.
DOOR FOR CLOSING A CHAMBER OPENING IN A CHAMBER WALL OF A VACUUM CHAMBER
BLECHA THOMAS (author)
2017-11-16
Patent
Electronic Resource
English
IPC:
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
/
E05D
Scharniere oder andere Aufhängevorrichtungen für Türen, Fenster oder Flügel
,
HINGES OR OTHER SUSPENSION DEVICES FOR DOORS, WINDOWS, OR WINGS
/
E05F
DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION
,
Vorrichtungen zum Bewegen der Flügel in die Offen- oder Schließstellung
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
Door for closing a chamber opening in a chamber wall of a vacuum chamber
| European Patent Office | 2019
| European Patent Office | 2023