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ALUMINA SINTERED BODY AND MANUFACTURING METHOD THEREFOR
The present invention relates to an alumina sintered body and a manufacturing method therefor; for example, the present invention relates to an alumina sintered body that is suitably utilized for a member or similar used in a plasma processing device, an etcher for semiconductor/liquid crystal display device manufacturing, a CVD device, or similar, or that is suitably utilized for a substrate or similar of a plasma-resistant member which is to be coated, as well as a manufacturing method for said alumina sintered body.
ALUMINA SINTERED BODY AND MANUFACTURING METHOD THEREFOR
The present invention relates to an alumina sintered body and a manufacturing method therefor; for example, the present invention relates to an alumina sintered body that is suitably utilized for a member or similar used in a plasma processing device, an etcher for semiconductor/liquid crystal display device manufacturing, a CVD device, or similar, or that is suitably utilized for a substrate or similar of a plasma-resistant member which is to be coated, as well as a manufacturing method for said alumina sintered body.
ALUMINA SINTERED BODY AND MANUFACTURING METHOD THEREFOR
YOSHIDA SAYUKI (author) / MIYASHITA YUKIHISA (author)
2020-08-27
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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