A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
HOLDING DEVICE AND METHOD OF MANUFACTURING HOLDING DEVICE
A holding device including a ceramic member formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, and an electrically conductive electricity supply member in contact with the heating resistor element. The holding device holds an object on the surface of the ceramic member. In the holding device, at least a portion of the surface of the heating resistor element, excluding its contact surface for contact with the electricity supply member, is covered with a coat layer formed of a nitride containing at least one of Al, Ti, Zr, V, Ta, and Nb. Also disclosed is a method of manufacturing the holding device.
HOLDING DEVICE AND METHOD OF MANUFACTURING HOLDING DEVICE
A holding device including a ceramic member formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, and an electrically conductive electricity supply member in contact with the heating resistor element. The holding device holds an object on the surface of the ceramic member. In the holding device, at least a portion of the surface of the heating resistor element, excluding its contact surface for contact with the electricity supply member, is covered with a coat layer formed of a nitride containing at least one of Al, Ti, Zr, V, Ta, and Nb. Also disclosed is a method of manufacturing the holding device.
HOLDING DEVICE AND METHOD OF MANUFACTURING HOLDING DEVICE
SAKAMAKI RYUNOSUKE (author) / TAKAOKA KATSUYA (author) / WATANABE HIROSHI (author)
2020-12-24
Patent
Electronic Resource
English
HOLDING DEVICE AND METHOD FOR MANUFACTURING HOLDING DEVICE
| European Patent Office | 2019
Holding device and method of manufacturing holding device
| European Patent Office | 2024
Method for manufacturing holding device and holding device
| European Patent Office | 2024
METHOD FOR MANUFACTURING HOLDING DEVICE AND HOLDING DEVICE
| European Patent Office | 2021
METHOD FOR MANUFACTURING HOLDING DEVICE AND HOLDING DEVICE
| European Patent Office | 2019