A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC SUBSTRATE AND SUSCEPTOR
A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.
CERAMIC SUBSTRATE AND SUSCEPTOR
A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.
CERAMIC SUBSTRATE AND SUSCEPTOR
KOSAKAI MAMORU (author) / HIDAKA NOBUHIRO (author) / KIMURA NAOTO (author) / KUGIMOTO HIRONORI (author)
2021-01-14
Patent
Electronic Resource
English