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A platform for research: civil engineering, architecture and urbanism
ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREFOR
The present invention relates to a method for manufacturing an electrostatic chuck comprising: a base member of a metal material; and a dielectric layer, formed on an upper surface of the base member, including an electrode layer to the inside of which a DC power is applied. According to the present invention, the dielectric layer is formed of a ceramic material by using at least one selected from among a plasma spraying method and a sol-gel method, and thus can be provided with low porosity to increase in lifespan, and with high permittivity to increase in adhesion force to a substrate.
ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREFOR
The present invention relates to a method for manufacturing an electrostatic chuck comprising: a base member of a metal material; and a dielectric layer, formed on an upper surface of the base member, including an electrode layer to the inside of which a DC power is applied. According to the present invention, the dielectric layer is formed of a ceramic material by using at least one selected from among a plasma spraying method and a sol-gel method, and thus can be provided with low porosity to increase in lifespan, and with high permittivity to increase in adhesion force to a substrate.
ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREFOR
CHO SAENG HYUN (author)
2021-02-25
Patent
Electronic Resource
English
ELECTROSTATIC CHUCK DEVICE AND MANUFACTURING METHOD THEREFOR
| European Patent Office | 2020