A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
An electrostatic chuck of the disclosure includes a ceramic base in plate form, and an electrostatic attraction electrode. The ceramic base includes a plurality of particles containing aluminum oxide as a main component. The plurality of particles contain magnesium atoms and zirconium atoms.
ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
An electrostatic chuck of the disclosure includes a ceramic base in plate form, and an electrostatic attraction electrode. The ceramic base includes a plurality of particles containing aluminum oxide as a main component. The plurality of particles contain magnesium atoms and zirconium atoms.
ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
ONO HIROSHI (author)
2021-08-19
Patent
Electronic Resource
English
| European Patent Office | 2024
METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK, AND ELECTROSTATIC CHUCK
| European Patent Office | 2025
| European Patent Office | 2023
| European Patent Office | 2024
| European Patent Office | 2023