A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
OXIDE SINTERED BODY
An oxide sintered body may include zinc, magnesium, a positive trivalent or positive tetravalent metal element X, and oxygen as constituent elements. The atomic ratio of the metal element X to the sum of the zinc, the magnesium, and the metal element X [X/(Zn+Mg+X)] may be 0.0001 or more and 0.6 or less. The atomic ratio of the magnesium to the sum of the zinc and the magnesium [Mg/(Zn+Mg)] may be 0.25 or more and 0.8 or less.
OXIDE SINTERED BODY
An oxide sintered body may include zinc, magnesium, a positive trivalent or positive tetravalent metal element X, and oxygen as constituent elements. The atomic ratio of the metal element X to the sum of the zinc, the magnesium, and the metal element X [X/(Zn+Mg+X)] may be 0.0001 or more and 0.6 or less. The atomic ratio of the magnesium to the sum of the zinc and the magnesium [Mg/(Zn+Mg)] may be 0.25 or more and 0.8 or less.
OXIDE SINTERED BODY
TOMAI SHIGEKAZU (author) / UEOKA YOSHIHIRO (author) / KATSUMATA SATOSHI (author) / SASAKI KENICHI (author)
2022-11-10
Patent
Electronic Resource
English
OXIDE SINTERED BODY AND METHOD FOR PRODUCING OXIDE SINTERED BODY
| European Patent Office | 2023
OXIDE SINTERED BODY AND METHOD FOR PRODUCING OXIDE SINTERED BODY
| European Patent Office | 2021
OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING OXIDE SINTERED BODY
| European Patent Office | 2017