A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
METHOD FOR MANUFACTURING CERAMIC SUSCEPTOR
Disclosed is a method for manufacturing a ceramic susceptor, the method including: preparing ceramic sheets; preparing a lamination structure of a molded body, in which the ceramic sheets are laminated and a conductive metal layer for electrodes is disposed between the ceramic sheet laminated products; and sintering the lamination structure of the molded body, wherein the preparing of the ceramic sheets includes: obtaining a vitrified first additive powder by heat-treating a slurry containing MgO, SiO2, and CaO; preparing a slurry by mixing an Al2O3 powder with the first additive powder, a second additive powder containing a MgO powder, and a third additive powder containing a Y2O3 powder; and forming the ceramic sheets by tape casting the slurry.
METHOD FOR MANUFACTURING CERAMIC SUSCEPTOR
Disclosed is a method for manufacturing a ceramic susceptor, the method including: preparing ceramic sheets; preparing a lamination structure of a molded body, in which the ceramic sheets are laminated and a conductive metal layer for electrodes is disposed between the ceramic sheet laminated products; and sintering the lamination structure of the molded body, wherein the preparing of the ceramic sheets includes: obtaining a vitrified first additive powder by heat-treating a slurry containing MgO, SiO2, and CaO; preparing a slurry by mixing an Al2O3 powder with the first additive powder, a second additive powder containing a MgO powder, and a third additive powder containing a Y2O3 powder; and forming the ceramic sheets by tape casting the slurry.
METHOD FOR MANUFACTURING CERAMIC SUSCEPTOR
LEE HYEON JUN (author) / YOO CHANG MIN (author)
2023-07-06
Patent
Electronic Resource
English