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    Deposition Of Piezoelectric Films

    New search for: SHARMA VIJAY BHAN
    New search for: XUE YUAN
    New search for: SANGLE ABHIJEET LAXMAN
    New search for: RAMAKRISHNAN BHARATWAJ
    New search for: YANG YI
    New search for: SETH SURESH CHAND
    New search for: KADAM ANKUR ANANT

    A piezoelectric device comprises: a substrate (12) and a lead magnesium niobate-lead titanate (PMNPT) piezoelectric film on the substrate (12). The PMNPT film comprises: a thermal oxide layer (20) on the substrate (12); a first electrode above on the thermal oxide layer (20); a seed layer (26) above the first electrode; a lead magnesium niobate-lead titanate (PMNPT) piezoelectric layer (16) on the seed layer (26), and a second electrode on the PMNPT piezoelectric layer (16). The PMNPT film comprises a piezoelectric coefficient (d33) of greater than or equal to 200 pm/V.

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    Deposition Of Piezoelectric Films

    New search for: SHARMA VIJAY BHAN
    New search for: XUE YUAN
    New search for: SANGLE ABHIJEET LAXMAN
    New search for: RAMAKRISHNAN BHARATWAJ
    New search for: YANG YI
    New search for: SETH SURESH CHAND
    New search for: KADAM ANKUR ANANT

    A piezoelectric device comprises: a substrate (12) and a lead magnesium niobate-lead titanate (PMNPT) piezoelectric film on the substrate (12). The PMNPT film comprises: a thermal oxide layer (20) on the substrate (12); a first electrode above on the thermal oxide layer (20); a seed layer (26) above the first electrode; a lead magnesium niobate-lead titanate (PMNPT) piezoelectric layer (16) on the seed layer (26), and a second electrode on the PMNPT piezoelectric layer (16). The PMNPT film comprises a piezoelectric coefficient (d33) of greater than or equal to 200 pm/V.

    Access

    Download

    Deposition Of Piezoelectric Films

    New search for: SHARMA VIJAY BHAN
    New search for: XUE YUAN
    New search for: SANGLE ABHIJEET LAXMAN
    New search for: RAMAKRISHNAN BHARATWAJ
    New search for: YANG YI
    New search for: SETH SURESH CHAND
    New search for: KADAM ANKUR ANANT

    A piezoelectric device comprises: a substrate (12) and a lead magnesium niobate-lead titanate (PMNPT) piezoelectric film on the substrate (12). The PMNPT film comprises: a thermal oxide layer (20) on the substrate (12); a first electrode above on the thermal oxide layer (20); a seed layer (26) above the first electrode; a lead magnesium niobate-lead titanate (PMNPT) piezoelectric layer (16) on the seed layer (26), and a second electrode on the PMNPT piezoelectric layer (16). The PMNPT film comprises a piezoelectric coefficient (d33) of greater than or equal to 200 pm/V.

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    Title:

    Deposition Of Piezoelectric Films

    Contributors:

    SHARMA VIJAY BHAN (author) / XUE YUAN (author) / SANGLE ABHIJEET LAXMAN (author) / RAMAKRISHNAN BHARATWAJ (author) / YANG YI (author) / SETH SURESH CHAND (author) / KADAM ANKUR ANANT (author)

    Publication date:

    2024-04-04

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H10N / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / C30B SINGLE-CRYSTAL GROWTH , Züchten von Einkristallen / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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