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Deposition Of Piezoelectric Films

SHARMA VIJAY BHAN / XUE YUAN / SANGLE ABHIJEET LAXMAN / RAMAKRISHNAN BHARATWAJ / YANG YI / SETH SURESH CHAND / KADAM ANKUR ANANT

Abstract

A piezoelectric device comprises: a substrate (12) and a lead magnesium niobate-lead titanate (PMNPT) piezoelectric film on the substrate (12). The PMNPT film comprises: a thermal oxide layer (20) on the substrate (12); a first electrode above on the thermal oxide layer (20); a seed layer (26) above the first electrode; a lead magnesium niobate-lead titanate (PMNPT) piezoelectric layer (16) on the seed layer (26), and a second electrode on the PMNPT piezoelectric layer (16). The PMNPT film comprises a piezoelectric coefficient (d33) of greater than or equal to 200 pm/V.

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Deposition Of Piezoelectric Films

SHARMA VIJAY BHAN / XUE YUAN / SANGLE ABHIJEET LAXMAN / RAMAKRISHNAN BHARATWAJ / YANG YI / SETH SURESH CHAND / KADAM ANKUR ANANT

Abstract

Deposition Of Piezoelectric Films

SHARMA VIJAY BHAN / XUE YUAN / SANGLE ABHIJEET LAXMAN / RAMAKRISHNAN BHARATWAJ / YANG YI / SETH SURESH CHAND / KADAM ANKUR ANANT

Abstract

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Titel:

Deposition Of Piezoelectric Films

Beteiligte:

SHARMA VIJAY BHAN (Autor:in) / XUE YUAN (Autor:in) / SANGLE ABHIJEET LAXMAN (Autor:in) / RAMAKRISHNAN BHARATWAJ (Autor:in) / YANG YI (Autor:in) / SETH SURESH CHAND (Autor:in) / KADAM ANKUR ANANT (Autor:in)

Erscheinungsdatum:

04.04.2024

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Englisch

Klassifikation:

IPC: H10N / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / C30B SINGLE-CRYSTAL GROWTH , Züchten von Einkristallen / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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