A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
TUNGSTEN SUBOXIDE CERAMIC TARGET
A target for sputtering, use of the target and method of manufacture of the target is provided. The target has a single piece target material for sputter deposition, with at least 1 mm thickness of material for sputtering, having a lamellar structure and comprising a metal oxide with at least 50 wt. % or more of tungsten oxide. The atomic ratio of oxygen over tungsten results in a compound with oxygen deficiency with respect to the stoichiometric tungsten oxide. The method includes spraying metallic tungsten and/or tungsten oxide powder in amounts so as to provide a layer of material for sputtering being at least 1 mm thick and comprising non-stoichiometric tungsten oxide.
TUNGSTEN SUBOXIDE CERAMIC TARGET
A target for sputtering, use of the target and method of manufacture of the target is provided. The target has a single piece target material for sputter deposition, with at least 1 mm thickness of material for sputtering, having a lamellar structure and comprising a metal oxide with at least 50 wt. % or more of tungsten oxide. The atomic ratio of oxygen over tungsten results in a compound with oxygen deficiency with respect to the stoichiometric tungsten oxide. The method includes spraying metallic tungsten and/or tungsten oxide powder in amounts so as to provide a layer of material for sputtering being at least 1 mm thick and comprising non-stoichiometric tungsten oxide.
TUNGSTEN SUBOXIDE CERAMIC TARGET
CARETTI GIANGASPRO IGNACIO (author) / DEBRUYNE DAVID (author) / FACK FREDDY (author) / DE BOSSCHER WILMERT (author)
2024-07-11
Patent
Electronic Resource
English
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