A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
HYBRID CHEMICAL-PHYSICAL VAPOR DEPOSITION PROCESS FOR THE SYNTHESIS OF ENVIRONMENTAL BARRIER COATINGS
A manufacturing process for the synthesis of environmental barrier coating system (EBC) which protect Si-based Ceramic Matrix Composite (CMC) material against oxidation and volatilization at high temperatures is disclosed. The manufacturing process is carried out in vacuum and includes steps of depositing a silicon bond coat and an oxygen containing barrier coating. The process is supported by plasma, preferably through and arc discharge, which lead to full dissociation of the gas precursors such as silane. Plasma is as well used for pre-treatment of substrates in an uninterrupted process chain. A deposition system with essential vacuum and plasma components is disclosed as well as EBC coatings manufactured by the process.
HYBRID CHEMICAL-PHYSICAL VAPOR DEPOSITION PROCESS FOR THE SYNTHESIS OF ENVIRONMENTAL BARRIER COATINGS
A manufacturing process for the synthesis of environmental barrier coating system (EBC) which protect Si-based Ceramic Matrix Composite (CMC) material against oxidation and volatilization at high temperatures is disclosed. The manufacturing process is carried out in vacuum and includes steps of depositing a silicon bond coat and an oxygen containing barrier coating. The process is supported by plasma, preferably through and arc discharge, which lead to full dissociation of the gas precursors such as silane. Plasma is as well used for pre-treatment of substrates in an uninterrupted process chain. A deposition system with essential vacuum and plasma components is disclosed as well as EBC coatings manufactured by the process.
HYBRID CHEMICAL-PHYSICAL VAPOR DEPOSITION PROCESS FOR THE SYNTHESIS OF ENVIRONMENTAL BARRIER COATINGS
CHEN DIANYING (author) / WIDRIG BENO (author) / RAMM JUERGEN (author)
2025-02-06
Patent
Electronic Resource
English
Hybrid chemical-physical vapor deposition process for synthesizing environmental barrier coatings
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