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Alumina sintered body, member including the same, and semiconductor manufacturing apparatus
An alumina sintered body contains alumina as a main component and titanium. The alumina sintered body further contains at least one element selected from the group consisting of lanthanum, neodymium, and cerium. Aluminum is contained in the alumina sintered body in an amount such that a ratio of aluminum oxide to total oxides in the alumina sintered body becomes 93.00 to 99.85% by weight where the total oxides are defined as a total amount of all oxides contained in the alumina sintered body. Titanium is contained in an amount such that a ratio of titanium oxide to the total oxides becomes 0.10 to 2.00% by weight. Lanthanum, neodymium, and cerium are contained in a combined amount such that a ratio of the combined amount to the total oxides becomes 0.05 to 5.00% by weight. Volume resistivity is 1×105 to 1×1012 Ω·cm at room temperature.
Alumina sintered body, member including the same, and semiconductor manufacturing apparatus
An alumina sintered body contains alumina as a main component and titanium. The alumina sintered body further contains at least one element selected from the group consisting of lanthanum, neodymium, and cerium. Aluminum is contained in the alumina sintered body in an amount such that a ratio of aluminum oxide to total oxides in the alumina sintered body becomes 93.00 to 99.85% by weight where the total oxides are defined as a total amount of all oxides contained in the alumina sintered body. Titanium is contained in an amount such that a ratio of titanium oxide to the total oxides becomes 0.10 to 2.00% by weight. Lanthanum, neodymium, and cerium are contained in a combined amount such that a ratio of the combined amount to the total oxides becomes 0.05 to 5.00% by weight. Volume resistivity is 1×105 to 1×1012 Ω·cm at room temperature.
Alumina sintered body, member including the same, and semiconductor manufacturing apparatus
ITO YOICHI (author) / TSUJI MASAKI (author) / TOSA AKIFUMI (author) / SAWAMURA TAKENORI (author)
2015-09-15
Patent
Electronic Resource
English
ALUMINA SINTERED BODY MEMBER INCLUDING THE SAME AND SEMICONDUCTOR MANUFACTURING APPARATUS
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