A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
POROUS CERAMIC, MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS, SHOWER PLATE, AND PLUG
A porous ceramic according to the present disclosure includes yttrium zirconate and yttrium oxide, and employs at least one thereof as a main component. This member for semiconductor manufacturing apparatus, such as a shower plate, plug, or the like, in a semiconductor manufacturing apparatus, is made of said porous ceramic.
L'invention concerne une céramique poreuse comprenant du zirconate d'yttrium et de l'oxyde d'yttrium, et utilisant au moins l'un de ceux-ci en tant que composant principal. Cet élément pour appareil de fabrication de semi-conducteur, tel qu'une plaque de douche, une fiche, ou similaire, dans un appareil de fabrication de semi-conducteur, est constitué de ladite céramique poreuse.
本開示の多孔質セラミックスは、ジルコン酸イットリウムおよび酸化イットリウムを含み、その少なくともいずれかを主成分とする。半導体製造装置におけるシャワープレートまたはプラグ等の半導体製造装置用部材は、上記多孔質セラミックスからなる。
POROUS CERAMIC, MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS, SHOWER PLATE, AND PLUG
A porous ceramic according to the present disclosure includes yttrium zirconate and yttrium oxide, and employs at least one thereof as a main component. This member for semiconductor manufacturing apparatus, such as a shower plate, plug, or the like, in a semiconductor manufacturing apparatus, is made of said porous ceramic.
L'invention concerne une céramique poreuse comprenant du zirconate d'yttrium et de l'oxyde d'yttrium, et utilisant au moins l'un de ceux-ci en tant que composant principal. Cet élément pour appareil de fabrication de semi-conducteur, tel qu'une plaque de douche, une fiche, ou similaire, dans un appareil de fabrication de semi-conducteur, est constitué de ladite céramique poreuse.
本開示の多孔質セラミックスは、ジルコン酸イットリウムおよび酸化イットリウムを含み、その少なくともいずれかを主成分とする。半導体製造装置におけるシャワープレートまたはプラグ等の半導体製造装置用部材は、上記多孔質セラミックスからなる。
POROUS CERAMIC, MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS, SHOWER PLATE, AND PLUG
CÉRAMIQUE POREUSE, ÉLÉMENT POUR APPAREIL DE FABRICATION DE SEMI-CONDUCTEUR, PLAQUE DE DOUCHE ET FICHE
多孔質セラミックス、半導体製造装置用部材、シャワープレートおよびプラグ
MATSUFUJI HIROMASA (author)
2020-05-07
Patent
Electronic Resource
Japanese
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