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Cantilever Accelerometer
Four accelerometer models were designed, manufactured and evaluated during the term of the contract. These were built using single crystalline silicon and integrated circuit fabrication techniques. The basic physical structure used on all accelerometer models was the 'H' geometry. The difference between the models was the topographical locations of the piezoresistor bridge, and electronic components which were adjusted in order to obtain optimized accelerometer performance. (Author)
Cantilever Accelerometer
Four accelerometer models were designed, manufactured and evaluated during the term of the contract. These were built using single crystalline silicon and integrated circuit fabrication techniques. The basic physical structure used on all accelerometer models was the 'H' geometry. The difference between the models was the topographical locations of the piezoresistor bridge, and electronic components which were adjusted in order to obtain optimized accelerometer performance. (Author)
Cantilever Accelerometer
W. C. Rosvold (author) / M. L. Stephens (author)
1977
86 pages
Report
No indication
English
Laboratory & Test Facility Design & Operation , Accelerometers , Piezoelectric transducers , Integrated circuits , Fabrication , Silicon , Low costs , Piezoelectric crystals , Performance(Engineering) , Cantilever beams , Springs , Anisotropy , Etched crystals , Ion implantation , Wafers , Chips(Electronics) , Cantilever accelerometers
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