HVAC Systems for Semiconductor Cleanrooms-Part 1: System Components

Naughton, P. / American Society of Heating, Refrigerating and Air-Conditioning Engineers | British Library Conference Proceedings | 1990

HVAC Systems for Semiconductor Cleanrooms-Part 2: Total System Dynamics

Naughton, P. / American Society of Heating, Refrigerating and Air-Conditioning Engineers | British Library Conference Proceedings | 1990

ASHRAE design guide for cleanrooms

American Society of Heating, Refrigerating and Air-Conditioning Engineers | TIBKAT | 2017

Cleanrooms: New building regulations mean cleanrooms must save energy

British Library Online Contents | 2007

Keeping Cleanrooms Clean

Veazey, M. V. | British Library Online Contents | 2005