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    HVAC Systems for Semiconductor Cleanrooms-Part 2: Total System Dynamics

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    HVAC Systems for Semiconductor Cleanrooms-Part 2: Total System Dynamics

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    HVAC Systems for Semiconductor Cleanrooms-Part 2: Total System Dynamics

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    Access via TIB
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    Document information
    Title:

    HVAC Systems for Semiconductor Cleanrooms-Part 2: Total System Dynamics

    Contributors:

    Naughton, P. (author) / American Society of Heating, Refrigerating and Air-Conditioning Engineers

    Conference:

    Annual meeting ; 1990 ; St Louis; MO

    Published in:

    Annual meeting ; 626-636

    TRANSACTIONS- AMERICAN SOCIETY OF HEATING REFRIGERATING AND AIR CONDITIONING ENGINEERS ; 96

    Publication date:

    1990-01-01

    Size:

    11 pages

    Remarks:

    In 2 pts

    ISSN:

    0001-2505

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    ASHRAE , air-conditioning engineers , heating

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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