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Power consumption benchmark for a semiconductor cleanroom facility system

Hu, Shih-Cheng

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Power consumption benchmark for a semiconductor cleanroom facility system

Hu, Shih-Cheng

Power consumption benchmark for a semiconductor cleanroom facility system

Hu, Shih-Cheng

Access

Check availability in my library

Order at Subito €

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Document information

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Title:

Power consumption benchmark for a semiconductor cleanroom facility system

Contributors:

Hu, Shih-Cheng (author) / Wu, Jen-Syua / Chan, David Yih-Liang / Hsu, Rich Tsung-Chi / Lee, Jane Car-Cheng

Published in:

Energy and buildings ; 40

Publication date:

2008

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

Unknown

Keywords:

Zeitschrift , Bauphysik

Classification:

BKL: 52.42 / 52.42 Heizungstechnik, Lüftungstechnik, Klimatechnik / 56.50 Technischer Ausbau / 56.55 Bauphysik, Bautenschutz / 56.55 / 56.65 / 56.00 / 56.65 Bauökologie, Baubiologie / 56.50
Local classification TIB: 645/6520/6605

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