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    Diffractive optical elements obtained using electron-beam writer and reactive ion etching

    New search for: Kowalik, Andrzej
    New search for: Jaroszewicz, Zbigniew
    New search for: Gora, Krzysztof

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    Diffractive optical elements obtained using electron-beam writer and reactive ion etching

    New search for: Kowalik, Andrzej
    New search for: Jaroszewicz, Zbigniew
    New search for: Gora, Krzysztof

    Access

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    Check availability in my library
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    Diffractive optical elements obtained using electron-beam writer and reactive ion etching

    New search for: Kowalik, Andrzej
    New search for: Jaroszewicz, Zbigniew
    New search for: Gora, Krzysztof

    Access

    Check access
    Check availability in my library
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    Document information
    Title:

    Diffractive optical elements obtained using electron-beam writer and reactive ion etching

    Contributors:

    Kowalik, Andrzej (author) / Jaroszewicz, Zbigniew (author) / Gora, Krzysztof (author)

    Conference:

    Optical Techniques for Environmental Sensing, Workplace Safety, and Health Monitoring ; 2001 ; Warsaw,Poland

    Published in:

    Proc. SPIE ; 4887

    Publication date:

    2002-07-22

    ISBN:

    9780819446695

    ISSN:

    0277-786X

    DOI:

    https://doi.org/10.1117/12.475983

    Type of media:

    Conference paper

    Type of material:

    Electronic Resource

    Language:

    English

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