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Abstract Spin coating is a simple process for rapidly depositing thin coatings onto relatively flat substrates. The substrate to be covered is held by some rotatable fixture (often using vacuum to clamp the substrate in place) and the coating solution is dispensed onto the surface; the action of spinning causes the solution to spread out and leave behind a very uniform coating of the chosen material on the surface of the substrate. The spin coating process has been studied extensively in the past and much is known about factors that control coating deposition and the final thickness of the deposit that results [1–10].
Abstract Spin coating is a simple process for rapidly depositing thin coatings onto relatively flat substrates. The substrate to be covered is held by some rotatable fixture (often using vacuum to clamp the substrate in place) and the coating solution is dispensed onto the surface; the action of spinning causes the solution to spread out and leave behind a very uniform coating of the chosen material on the surface of the substrate. The spin coating process has been studied extensively in the past and much is known about factors that control coating deposition and the final thickness of the deposit that results [1–10].
Spin Coating Technique
Birnie, D. P. III (author)
2004-01-01
7 pages
Article/Chapter (Book)
Electronic Resource
English
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