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    Microactuators

    Abstract Presently, considerable efforts are undertaken worldwide to develop microsystems, which may comprise various functional units, including mechanical, optical, and fluidic components and subsystems. Figure 2.1 gives an overview of application fields that are of relevance to microsystems technology [21].

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    Microactuators

    Abstract Presently, considerable efforts are undertaken worldwide to develop microsystems, which may comprise various functional units, including mechanical, optical, and fluidic components and subsystems. Figure 2.1 gives an overview of application fields that are of relevance to microsystems technology [21].

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    Microactuators

    Abstract Presently, considerable efforts are undertaken worldwide to develop microsystems, which may comprise various functional units, including mechanical, optical, and fluidic components and subsystems. Figure 2.1 gives an overview of application fields that are of relevance to microsystems technology [21].

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    Title:

    Microactuators

    Contributors:

    PD Dr. rer. nat. habil. Kohl, Manfred (author)

    Published in:

    Shape Memory Microactuators ; 5-24

    Microtechnology and MEMS

    Publication date:

    2004-01-01

    Size:

    20 pages

    ISBN:

    978-3-662-09875-2 , 978-3-642-05837-0

    ISSN:

    1615-8326

    DOI:

    https://doi.org/10.1007/978-3-662-09875-2_2

    Type of media:

    Article/Chapter (Book)

    Type of material:

    Electronic Resource

    Language:

    English

    Keywords:

    Linear Actuator , Valve Seat , Silicon Technology , Work Density , Capacitor Element Engineering , Mechanical Engineering , Nanotechnology and Microengineering , Applied and Technical Physics , Nanotechnology , Measurement Science and Instrumentation , Machinery and Machine Elements

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