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Photothermal Microactuators Fabricated by LIGA Technology

Wang, B. / Shi, B. / Yi, F.T. / Zhang, D.X. / Zhang, H.J. / Zhang, T.C. / Liu, J. / Ma, L.N.

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Photothermal Microactuators Fabricated by LIGA Technology

Wang, B. / Shi, B. / Yi, F.T. / Zhang, D.X. / Zhang, H.J. / Zhang, T.C. / Liu, J. / Ma, L.N.

Photothermal Microactuators Fabricated by LIGA Technology

Wang, B. / Shi, B. / Yi, F.T. / Zhang, D.X. / Zhang, H.J. / Zhang, T.C. / Liu, J. / Ma, L.N.

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Check availability in my library

Order at Subito €

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Document information

Title:

Photothermal Microactuators Fabricated by LIGA Technology

Contributors:

Wang, B. (author) / Shi, B. (author) / Yi, F.T. (author) / Zhang, D.X. (author) / Zhang, H.J. (author) / Zhang, T.C. (author) / Liu, J. (author) / Ma, L.N. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 534-537

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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