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Nanostructure Fabrication I
Abstract The techniques used to fabricate nanoscale structures are continually evolving, and comprise methods that have been developed for over three decades, as well as very new and promising approaches whose potential has not yet been fully realized. Any discussion of nanofabrication techniques will therefore soon be outdated, and can only hope to illustrate the range of possibility. In this and the next chapter, we will focus on a description of the more conventional techniques, outlining their use and their limitations, and in addition we will briefly mention some of the other techniques that are under development. These two chapter therefore cover a significantly different topic from the first nine chapters in this book; here the information discussed is primarily technical, specific to the problem of fabrication and not directed towards developing a theoretical understanding of mechanical structures. It is provided here for the use of researchers interested in developing an understanding of what is involved in fabricating nanostructures, and possibly employing some of these techniques in their own research.
Nanostructure Fabrication I
Abstract The techniques used to fabricate nanoscale structures are continually evolving, and comprise methods that have been developed for over three decades, as well as very new and promising approaches whose potential has not yet been fully realized. Any discussion of nanofabrication techniques will therefore soon be outdated, and can only hope to illustrate the range of possibility. In this and the next chapter, we will focus on a description of the more conventional techniques, outlining their use and their limitations, and in addition we will briefly mention some of the other techniques that are under development. These two chapter therefore cover a significantly different topic from the first nine chapters in this book; here the information discussed is primarily technical, specific to the problem of fabrication and not directed towards developing a theoretical understanding of mechanical structures. It is provided here for the use of researchers interested in developing an understanding of what is involved in fabricating nanostructures, and possibly employing some of these techniques in their own research.
Nanostructure Fabrication I
Prof. Cleland, Andrew N. (author)
2003-01-01
45 pages
Article/Chapter (Book)
Electronic Resource
English
Springer Verlag | 2003
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