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Low Energy Electron Microscopy (LEEM)
Abstract In LEEM, surfaces are imaged with LEED electrons1,3. Either the (00) beam (“bright field mode”) or any other diffracted beam (“dark field mode”) can be used for imaging. The lateral resolution obtained so far is about 15 nm, but 2 nm should be possible in an improved instrument2. The resolution normal to the surface allows imaging of mon atomic steps. The LEED pattem of the area imaged (diameter 5 - 10 µm) is readily obtained. The specimen can be heated, sputtered or covered by adsorbates and condensed layers in situ during observation.
Low Energy Electron Microscopy (LEEM)
Abstract In LEEM, surfaces are imaged with LEED electrons1,3. Either the (00) beam (“bright field mode”) or any other diffracted beam (“dark field mode”) can be used for imaging. The lateral resolution obtained so far is about 15 nm, but 2 nm should be possible in an improved instrument2. The resolution normal to the surface allows imaging of mon atomic steps. The LEED pattem of the area imaged (diameter 5 - 10 µm) is readily obtained. The specimen can be heated, sputtered or covered by adsorbates and condensed layers in situ during observation.
Low Energy Electron Microscopy (LEEM)
Telieps, W. (author) / Bauer, E. (author)
1988-01-01
5 pages
Article/Chapter (Book)
Electronic Resource
English
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