A platform for research: civil engineering, architecture and urbanism
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Fire hazards of wafer carriers in cleanroom environment
A new generation of larger (300-mm) wafer carriers is coming online and they can post a serious fire hazard in cleanroom environment. These 300-mm wafer carriers, designed as Front Opening Unified Pod (FOUP), have been standardized by the semiconductor industry. Each can carry 2 300-mm wafers and each semiconductor facility can have thousands of FOUPs. Many of the FOUPs reside in stockers for long period of time, up to four months. Some of the stockers are multi-floor high and contain hundreds of FOUPs. A loss due to fire can be significant. A fire hazard evaluation of the present 300-mm wafer carriers has been made and other potential candidate materials for wafer carier have been examined. Small-scale test results (ignition, combustion and propagation tests) from the ASTM E-2058 Fire Propagation Apparatus, large-scale results (parallel panel fire test) and full-scale results from simulated stocker fire test were obtained. A test protocol was proposed based on these results.
Fire hazards of wafer carriers in cleanroom environment
A new generation of larger (300-mm) wafer carriers is coming online and they can post a serious fire hazard in cleanroom environment. These 300-mm wafer carriers, designed as Front Opening Unified Pod (FOUP), have been standardized by the semiconductor industry. Each can carry 2 300-mm wafers and each semiconductor facility can have thousands of FOUPs. Many of the FOUPs reside in stockers for long period of time, up to four months. Some of the stockers are multi-floor high and contain hundreds of FOUPs. A loss due to fire can be significant. A fire hazard evaluation of the present 300-mm wafer carriers has been made and other potential candidate materials for wafer carier have been examined. Small-scale test results (ignition, combustion and propagation tests) from the ASTM E-2058 Fire Propagation Apparatus, large-scale results (parallel panel fire test) and full-scale results from simulated stocker fire test were obtained. A test protocol was proposed based on these results.
Fire hazards of wafer carriers in cleanroom environment
Brandgefahr von Halbleiterträgern in Reinraumumgebung
Wu, P.K.S. (author) / Chaffee, J.L. (author) / Peterkin, H. (author)
2003
13 Seiten, 11 Bilder, 3 Tabellen, 10 Quellen
Conference paper
English
Fire hazards of wafer carriers in clean room environment
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