Unconventional nanopatterning techniques and applications: Fid-Bau Portal

Unconventional nanopatterning techniques and applications

Rogers, John A.

12 SOFT LITHOGRAPHY FOR MICROFLUIDIC MICROELECTROMECHANICAL SYSTEMS (MEMS) AND OPTICAL DEVICES13 UNCONVENTIONAL PATTERNING METHODS FOR BIONEMS; 14 MICRO TOTAL ANALYSIS SYSTEM; 15 COMBINATIONS OF TOP-DOWN AND BOTTOM-UP NANOFABRICATION TECHNIQUES AND THEIR APPLICATION TO CREATE FUNCTIONAL DEVICES; 16 ORGANIC ELECTRONIC DEVICES; 17 INORGANIC ELECTRONIC DEVICES; 18 MECHANICS OF STRETCHABLE SILICON FILMS ON ELASTOMERIC SUBSTRATES; 19 MULTISCA.

Patterning or lithography is at the core of modern science and technology and cuts across all disciplines. With the emergence of nanotechnology, conventional methods based on electron beam lithography and extreme ultraviolet photolithography have become prohibitively expensive. As a result, a number of simple and unconventional methods have been introduced, beginning first with research demonstrations in the mid 1990s. This book focuses on these unconventional patterning techniques and their applications to optics, organic devices, electronic devices, biological devices, and fluidics

UNCONVENTIONAL NANOPATTERNING TECHNIQUES AND APPLICATIONS; CONTENTS; PREFACE; I NANOPATTERNING TECHNIQUES; 1 INTRODUCTION; 2 MATERIALS; 3 PATTERNING BASED ON NATURAL FORCE; 4 PATTERNING BASED ON WORK OF ADHESION; 5 PATTERNING BASED ON LIGHT: OPTICAL SOFT LITHOGRAPHY; 6 PATTERNING BASED ON EXTERNAL FORCE: NANOIMPRINT LITHOGRAPHY; 7 PATTERNING BASED ON EDGE EFFECTS: EDGE LITHOGRAPHY; 8 PATTERNING WITH ELECTROLYTE: SOLID-STATE SUPERIONIC STAMPING; 9 PATTERNING WITH GELS: LATTICE-GAS MODELS; 10 PATTERNING WITH BLOCK COPOLYMERS; 11 PERSPECTIVE ON APPLICATIONS; II APPLICATIONS.