Computer-generated holographic diffractive structures fabricated by direct excimer laser microetching [2403-46]

Boutsikaris, L. / Mailis, S. / Madamopoulos, N. et al. | British Library Conference Proceedings | 1995

Laser chemical etching of copper films [2403-34]

Aliouchouche, A. / Boulmer, J. / Debarre, D. et al. | British Library Conference Proceedings | 1995

Microwave-assisted laser dry etching of silicon [2403-44]

Pfleging, W. / Kreutz, E. W. / Wehner, M. et al. | British Library Conference Proceedings | 1995

Fabrication of submicron relief gratings in p-GaAs in the process of maskless holographic wet etching by laser-induced etch rate reduction method [2403-29]

Khudobenko, A. I. / Panchenko, V. Y. / Seminogov, V. N. et al. | British Library Conference Proceedings | 1995

Laser-assisted etching for micropatterning of InP [2403-30]

Prasad, M. / Dubowski, J. J. / Ruda, H. E. et al. | British Library Conference Proceedings | 1995