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Recent progress of obliquely deposited thin films for industrial applications (Invited Paper) [3790-11]
Recent progress of obliquely deposited thin films for industrial applications (Invited Paper) [3790-11]
Recent progress of obliquely deposited thin films for industrial applications (Invited Paper) [3790-11]
Suzuki, M. (Autor:in) / Ito, T. (Autor:in) / Taga, Y. (Autor:in) / Lakhtakia, A. / Messier, R. F. / SPIE
Conference, Engineered nanostructural films and materials ; 1999 ; Denver; CO
01.01.1999
12 pages
Aufsatz (Konferenz)
Englisch
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