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Glancing angle deposition: recent research results (Invited Paper) [3790-13]
Glancing angle deposition: recent research results (Invited Paper) [3790-13]
Glancing angle deposition: recent research results (Invited Paper) [3790-13]
Brett, M. J. (Autor:in) / Seto, M. W. (Autor:in) / Sit, J. C. (Autor:in) / Harris, K. D. (Autor:in) / Lakhtakia, A. / Messier, R. F. / SPIE
Conference, Engineered nanostructural films and materials ; 1999 ; Denver; CO
01.01.1999
5 pages
Aufsatz (Konferenz)
Englisch
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