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Recent progress of obliquely deposited thin films for industrial applications (Invited Paper) [3790-11]
Recent progress of obliquely deposited thin films for industrial applications (Invited Paper) [3790-11]
Recent progress of obliquely deposited thin films for industrial applications (Invited Paper) [3790-11]
Suzuki, M. (author) / Ito, T. (author) / Taga, Y. (author) / Lakhtakia, A. / Messier, R. F. / SPIE
Conference, Engineered nanostructural films and materials ; 1999 ; Denver; CO
1999-01-01
12 pages
Conference paper
English
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