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Glancing angle deposition: recent research results (Invited Paper) [3790-13]
Glancing angle deposition: recent research results (Invited Paper) [3790-13]
Glancing angle deposition: recent research results (Invited Paper) [3790-13]
Brett, M. J. (author) / Seto, M. W. (author) / Sit, J. C. (author) / Harris, K. D. (author) / Lakhtakia, A. / Messier, R. F. / SPIE
Conference, Engineered nanostructural films and materials ; 1999 ; Denver; CO
1999-01-01
5 pages
Conference paper
English
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