Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization [4281-03]: Fid-Bau Portal

Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization [4281-03]

Fukumura, T. / Ohtani, M. / Nishimura, J. / Kageyama, T. / Koida, T. / Lippmaa, M. / Kawasaki, M. / Hasegawa, T. / Koinuma, H. / International Society for Optical Engineering

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Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization [4281-03]

Fukumura, T. / Ohtani, M. / Nishimura, J. / Kageyama, T. / Koida, T. / Lippmaa, M. / Kawasaki, M. / Hasegawa, T. / Koinuma, H. / International Society for Optical Engineering

Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization [4281-03]

Fukumura, T. / Ohtani, M. / Nishimura, J. / Kageyama, T. / Koida, T. / Lippmaa, M. / Kawasaki, M. / Hasegawa, T. / Koinuma, H. / International Society for Optical Engineering

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Titel:

Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization [4281-03]

Beteiligte:

Fukumura, T. (Autor:in) / Ohtani, M. (Autor:in) / Nishimura, J. (Autor:in) / Kageyama, T. (Autor:in) / Koida, T. (Autor:in) / Lippmaa, M. (Autor:in) / Kawasaki, M. (Autor:in) / Hasegawa, T. (Autor:in) / Koinuma, H. (Autor:in) / Jabbour, G. E.

Kongress:

Conference; 2nd, Combinatorial and composition spread techniques in materials and device development ; 2001 ; San Jose, CA

Erschienen in:

Combinatorial and composition spread techniques in materials and device development ; 17-26

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4281

Erscheinungsdatum:

01.01.2001

Format / Umfang:

10 pages

ISBN:

0819439592

ISSN:

0277-786X

Medientyp:

Aufsatz (Konferenz)

Format:

Sprache:

Englisch

Schlagwörter:

combinatorial spread techniques , composition spread techniques , device development , spread techniques

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