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Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization [4281-03]
Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization [4281-03]
Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization [4281-03]
Fukumura, T. (author) / Ohtani, M. (author) / Nishimura, J. (author) / Kageyama, T. (author) / Koida, T. (author) / Lippmaa, M. (author) / Kawasaki, M. (author) / Hasegawa, T. (author) / Koinuma, H. (author) / Jabbour, G. E.
Conference; 2nd, Combinatorial and composition spread techniques in materials and device development ; 2001 ; San Jose, CA
2001-01-01
10 pages
Conference paper
English
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