Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Residual Stress Reduction in Sputter Deposited Thin Films by Density Modulation
Residual Stress Reduction in Sputter Deposited Thin Films by Density Modulation
Residual Stress Reduction in Sputter Deposited Thin Films by Density Modulation
Alagoz, A.S. (Autor:in) / Kamminga, J.-D. (Autor:in) / Grachev, S. (Autor:in) / Lu, T.-M. (Autor:in) / Karabacak, T. (Autor:in) / Lou, J. / Derlet, P.M. / Materials Research Society
Symposium, Mechanical Behavior at Small Scales; experiments and modeling ; 2009
01.01.2010
6 pages
Includes bibliographical references and index
Aufsatz (Konferenz)
Englisch
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