Residual Stress Reduction in Sputter Deposited Thin Films by Density Modulation

Alagoz, A.S. (author) / Kamminga, J.-D. (author) / Grachev, S. (author) / Lu, T.-M. (author) / Karabacak, T. (author) / Lou, J. / Derlet, P.M. / Materials Research Society

Symposium, Mechanical Behavior at Small Scales; experiments and modeling ; 2009

Mechanical Behavior at Small Scales; experiments and modeling ; 27-32

MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS ; 1224

2010-01-01

6 pages

Includes bibliographical references and index

9781605111971 , 160511197X

Conference paper

Print

English

Nanostructured materials