Growth mechanism of reactively sputtered aluminum nitride thin films

Hwang, B. H. / Chen, C. S. / Lu, H. Y. et al. | British Library Online Contents | 2002

Reactively sputtered WO~xN~y films

Shen, Y. G. / Mai, Y. W. | British Library Online Contents | 2000

Xenon implantation effects on the structural and optical properties of reactively sputtered titanium nitride thin films

Popović, M. / Novaković, M. / Mitrić, M. et al. | British Library Online Contents | 2017

Temperature dependence of resistance in reactively sputtered RuO~2 thin films

Tong, K. Y. / Jelenkovic, V. / Cheung, W. Y. et al. | British Library Online Contents | 2001

Structure of Reactively Sputtered Ta-N-O Films

Mattern, N. / Stavrev, M. / Fischer, D. | British Library Online Contents | 1998