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Tungsten/tungsten nitride performance at elevated temperature

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CVD Synthesis of Tungsten Nitride and Its Deposition Behavior

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Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

UMEDA KEIICHI / AKIYAMA MORITO / NAGASE TOSHIMI et al. | Europäisches Patentamt | 2019