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    Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

    Neue Suche nach: UMEDA KEIICHI
    Neue Suche nach: AKIYAMA MORITO
    Neue Suche nach: NAGASE TOSHIMI
    Neue Suche nach: NISHIKUBO KEIKO
    Neue Suche nach: HONDA ATSUSHI

    A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

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    Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

    Neue Suche nach: UMEDA KEIICHI
    Neue Suche nach: AKIYAMA MORITO
    Neue Suche nach: NAGASE TOSHIMI
    Neue Suche nach: NISHIKUBO KEIKO
    Neue Suche nach: HONDA ATSUSHI

    A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

    Zugriff

    Download

    Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

    Neue Suche nach: UMEDA KEIICHI
    Neue Suche nach: AKIYAMA MORITO
    Neue Suche nach: NAGASE TOSHIMI
    Neue Suche nach: NISHIKUBO KEIKO
    Neue Suche nach: HONDA ATSUSHI

    A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

    Zugriff

    Download

    Zugriff

    Download

    Seitennavigation

    Dokumentinformationen
    Ähnliche Titel

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    Titel:

    Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

    Beteiligte:

    UMEDA KEIICHI (Autor:in) / AKIYAMA MORITO (Autor:in) / NAGASE TOSHIMI (Autor:in) / NISHIKUBO KEIKO (Autor:in) / HONDA ATSUSHI (Autor:in)

    Erscheinungsdatum:

    12.11.2019

    Medientyp:

    Patent

    Format:

    Elektronische Ressource

    Sprache:

    Englisch

    Klassifikation:

    IPC:  H10N / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / G10K Tonerzeugungsvorrichtungen , SOUND-PRODUCING DEVICES / H03H IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS , Scheinwiderstandsnetzwerke, z.B. Resonanzkreise

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