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Conformal deposition on a deep-trenched substrate by MOCVD
Conformal deposition on a deep-trenched substrate by MOCVD
Conformal deposition on a deep-trenched substrate by MOCVD
Kusakabe, Y. (Autor:in) / Ohnishi, H. (Autor:in) / Takahama, T. (Autor:in) / Goto, Y. (Autor:in)
APPLIED SURFACE SCIENCE ; 70/71 ; 763
01.01.1993
763 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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