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First-order isothermal desorption kinetics of chlorine on SiH~2Cl~2-adsorbed Si(100) surface
First-order isothermal desorption kinetics of chlorine on SiH~2Cl~2-adsorbed Si(100) surface
First-order isothermal desorption kinetics of chlorine on SiH~2Cl~2-adsorbed Si(100) surface
Sakamoto, H. (Autor:in) / Takakuwa, Y. (Autor:in) / Hori, T. (Autor:in) / Horie, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 75 ; 27
01.01.1994
27 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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