First-order isothermal desorption kinetics of chlorine on SiH~2Cl~2-adsorbed Si(100) surface: Fid-Bau Portal

First-order isothermal desorption kinetics of chlorine on SiH~2Cl~2-adsorbed Si(100) surface

Sakamoto, H. / Takakuwa, Y. / Hori, T. / Horie, T.

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First-order isothermal desorption kinetics of chlorine on SiH~2Cl~2-adsorbed Si(100) surface

Sakamoto, H. / Takakuwa, Y. / Hori, T. / Horie, T.

First-order isothermal desorption kinetics of chlorine on SiH~2Cl~2-adsorbed Si(100) surface

Sakamoto, H. / Takakuwa, Y. / Hori, T. / Horie, T.

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Check availability in my library

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Document information

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Document information

Title:

First-order isothermal desorption kinetics of chlorine on SiH~2Cl~2-adsorbed Si(100) surface

Contributors:

Sakamoto, H. (author) / Takakuwa, Y. (author) / Hori, T. (author) / Horie, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 75 ; 27

Publication date:

1994-01-01

Size:

27 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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