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Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD
Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD
Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD
Treichel, H. (Autor:in) / Tomkewitsch, J. V. (Autor:in) / Spindler, O. (Autor:in)
MATERIALS SCIENCE FORUM ; 359
01.01.1993
359 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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