Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD

    New search for: Treichel, H.
    New search for: Tomkewitsch, J. V.
    New search for: Spindler, O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD

    New search for: Treichel, H.
    New search for: Tomkewitsch, J. V.
    New search for: Spindler, O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD

    New search for: Treichel, H.
    New search for: Tomkewitsch, J. V.
    New search for: Spindler, O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD

    Contributors:

    Treichel, H. (author) / Tomkewitsch, J. V. (author) / Spindler, O. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 359

    Publication date:

    1993-01-01

    Size:

    359 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    ECR Plasma Etching Technology for ULSI

    Samukawa, S. | British Library Online Contents | 1993

    Advanced Gettering Techniques in ULSI Technology

    Istratov, A. A. / Hieslmair, H. / Weber, E. R. | British Library Online Contents | 2000

    Electrochemically Deposited Copper for ULSI Technology

    Shacham-Diamand, Y. / Electrochemical Society; Electrodeposition Division | British Library Conference Proceedings | 1995

    Electromigration in ULSI interconnects

    Tan, C. M. / Roy, A. | British Library Online Contents | 2007

    Lithographic technologies for future ULSI

    Okazaki, S. | British Library Online Contents | 1993

    Back to top