CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media

Szívós, János / Pothorszky, Szilárd / Soltys, Jan et al. | British Library Online Contents | 2018

Laser-induced etching of tungsten

Piglmayer, K. / Schieche, H. | British Library Online Contents | 1997

CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media

Szívós, János / Pothorszky, Szilárd / Soltys, Jan et al. | British Library Online Contents | 2018

Patterned surfaces in p-type silicon by photodefined etching

Martins, M. C. / Gamboa, R. M. / Maia Alves, J. et al. | British Library Online Contents | 1999

Reactive Ion Etching of Silicon Carbide with Patterned Boron Implantation

Vassilevski, K. V. / Hedley, J. / Horsfall, A. B. et al. | British Library Online Contents | 2004