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CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media
CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media
CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media
Szívós, János (Autor:in) / Pothorszky, Szilárd (Autor:in) / Soltys, Jan (Autor:in) / Serényi, Miklós (Autor:in) / An, Hongyu (Autor:in) / Gao, Tenghua (Autor:in) / Deák, András (Autor:in) / Shi, Ji (Autor:in) / Sáfrán, György (Autor:in)
Applied surface science ; 435 ; 31-38
01.01.2018
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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