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Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation
Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation
Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation
Gaiduk, P. (Autor:in) / Komarov, F. (Autor:in) / Witzmann, A. (Autor:in) / Schippel, S. (Autor:in)
MATERIALS SCIENCE FORUM ; 1577
01.01.1993
1577 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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