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Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation
Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation
Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation
Gaiduk, P. (author) / Komarov, F. (author) / Witzmann, A. (author) / Schippel, S. (author)
MATERIALS SCIENCE FORUM ; 1577
1993-01-01
1577 pages
Article (Journal)
Unknown
DDC:
620.11
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