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    Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation

    New search for: Gaiduk, P.
    New search for: Komarov, F.
    New search for: Witzmann, A.
    New search for: Schippel, S.

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    Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation

    New search for: Gaiduk, P.
    New search for: Komarov, F.
    New search for: Witzmann, A.
    New search for: Schippel, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation

    New search for: Gaiduk, P.
    New search for: Komarov, F.
    New search for: Witzmann, A.
    New search for: Schippel, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Structure Investigations of Heteroepitaxial CoSi~2/Si Layers Formed by Ion Implantation

    Contributors:

    Gaiduk, P. (author) / Komarov, F. (author) / Witzmann, A. (author) / Schippel, S. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 1577

    Publication date:

    1993-01-01

    Size:

    1577 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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