Gettering in silicon-on-insulator wafers with polysilicon layer

Savin, H. / Yli-Koski, M. / Haarahiltunen, A. et al. | British Library Online Contents | 2009

Phosphorus Diffusion Gettering of Gold in Silicon

Sveinbjoernsson, E. O. / Engstroem, O. / Soedervall, U. | British Library Online Contents | 1993

Influence of carbon and oxygen on phosphorus and aluminium co-gettering in silicon solar cells

Mahfoud, K. / Loghmarti, M. / Muller, J. C. et al. | British Library Online Contents | 1996

Efficiency of cavity gettering in single and in multicrystalline silicon wafers

Martinuzzi, S. / Henquinet, N.G. / Perichaud, I. et al. | British Library Online Contents | 2000

Overview of phosphorus diffusion and gettering in multicrystalline silicon

Bentzen, A. / Holt, A. | British Library Online Contents | 2009